FF-M1x
紧凑型气体质量流量计
- 集成气体转换模块
- 22种气体嵌入
- 多参数输出:质量流量、温度和压力
- USB-C和蓝牙通信
- Namur NE107状态指示
FLEXI-FLOW Compact FF-M10 和 FF-M11紧凑型气体质量流量计适用于工作压力在真空和17 bar(a)条件下准确测量0…500 mln/min 和 0…20 ln/min之间的流量。仪表结合基于毛细管MEMS技术快速稳定的热式质量流量传感器和可靠准确的旁路结构。基于TCS技术,建立准确的质量流量测量,不受温度和管路压力变化影响。与集成温度和上下游压力传感器相结合,22种气体的嵌入式数据库实现精准集成转换。多参数仪表可提供过程信息:
Measurement / control system | |
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Flow range (intermediate ranges available) | min. 0…500 mln/min max. 0…20 ln/min (based on N2) |
Pressure ranges | FF-M10: not available / FF-M11: 0…17 bar(a) |
Accuracy (incl. linearity) (based on actual calibration) | Up to ±0.5% Rd plus ±0.1% FS (N2/Air/O2); for other gases add conversion uncertainty |
Repeatability | Flow sensor: < ±0.2% Rd; Pressure sensors: < ±0.2% FS |
Turndown ratio | up to 1:1000 |
Max. operating pressure | 16 bar g |
Multi Gas/Multi Range | embedded gas data for 22 unique gases plus any mixture of these gases |
Response time (sensor) | < 30 ms (T63) |
Long term stability | < 0.5% FS over period of 3 years; then < 0.2% FS per year |
Mounting | any position, attitude sensitivity negligible |
Temperature sensitivity | Flow sensor: zero 0.0015% FS/ºC; span 0.03% Rd/ºC; Pressure sensors: zero 0.16 mbar/ºC; span 0.05% Rd/ºC |
Temperature accuracy | ± 0.2 ºC (instrument body temperature) |
Accuracy pressure sensors | ±0.5% FS |
Pressure sensitivity | standard: < 0.15% Rd/bar typical N2; with pressure correction: < 0,02% Rd typical N2 |
Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
Mechanical parts | |
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Material (wetted parts) | aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass |
Surface quality | < 1.6 mu Ra (<0.8 mu Ra for stainless steel body) |
Pressure rating (PN) | 16 bar(g) / 250 psig |
Process connections | optional: compression type, push-in or face seal couplings |
Seals | default: FKM 51415; for other materials contact factory |
Weight | 200 g with Aluminium body, 300 g with SS 316 body |
Ingress protection | IP40 |
Instrument body | Aluminium or Stainless steel (selectable) |
Electrical properties | |
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Power supply | 24 Vdc ± 10% |
Max. power consumption | 0.35 Watt |
Digital communication | Modbus RTU or FLOW-BUS (selectable) |
Support interface | USB-C port for easy setup; Optional Bluetooth connection for monitoring |
Electrical connection | 9-pin D-sub (male) |
Electrical connection | |
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CE | EMC 2014/30/EU, RED 2014/53/EU, RoHS 2011/65/EU |
技术参数如有 变更,恕不另行通知。
更多资料
样册 | |
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FLEXI-FLOW brochure | ![]() |
说明书 | |
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Quick installation guide FLEXI-FLOW | ![]() |
快速安装指南 FLEXI-FLOW | ![]() |
使用说明书 FLEXI-FLOW | ![]() |
安装图 | |
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FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS | ![]() |
尺寸图 | |
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Dimensions FLEXI-FLOW Compact MFC-MFM | ![]() |